Design of a nonsingular adaptive fuzzy backstepping controller for electrostatically actuated microplates

摘要

This paper adopts some alternative strategies to design a nonlinear controller for double electrostatically actuated microplates. The novel design is carried out to solve the singularity problem reported in many articles due to the use of the Taylor expansion to simplify the electrostatic force. The nonlinear governing partial differential equation is converted to the modal equation using the Galerkin method. Then, based on the Lyapunov stability criterion, a fuzzy backstepping controller facilitated by prescribed performance functions is applied to the non-affine system to extend the travel range beyond the pull-in region and capture the structural and nonstructural uncertainties that exist in the practical systems. The present work also aims to bring satisfactory transient and steady-state performance indices to the system. Moreover, unknown time-varying delays as the indispensable part of practical systems are considered in the proposed control scheme to suppress the delays occurring in the measurement of the states by constructing Lyapunov-Krasovskii function. The accuracy of the modal equation in both the static and dynamic analysis is verified through a meshless method as a direct solution of the partial differential equation. The proposed controller guarantees that all the closed-loop signals are semi-globally, uniformly ultimately bounded, and the error evolves within the decaying prescribed bounds. Finally, the proposed controller demonstrates its feasibility to extend the travel range within and beyond the pull-in range despite the unknown uncertainties and time-varying delays which exist in the system.