Monolithic MEMS-Based Reflectarray Cell Digitally Reconfigurable Over a 360 $^{circ }$ Phase Range

摘要

In this letter, we present a reconfigurable reflectarray cell operating at 12 GHz and fabricated in a monolithic MEMS process. A 5-bit digital control allows reconfiguration of the reflection phase over the full 360 $^{circ }$ range, while alleviating the