A 1.6–2.3-GHz RF MEMS Reconfigurable Quadrature Coupler and Its Application to a 360 src='/images/tex/21612.gif' alt='^{circ } '> Reflective-Type Phase Shifter

摘要

This paper presents the design, fabrication, and measurement of a reconfigurable quadrature hybrid coupler and a tunable low-loss reflective-type phase shifter built using the Cavendish Kinetics RF microelectromechanical systems switched capacitor devices. The quadrature coupler tunes from 1.5 to 2.2 GHz with 20–50-MHz steps, and reflection and isolation. The phase shifter covers 360 at 2.0 GHz with an insertion loss of at different phase states. The linearity measurements show that these devices can handle up to 5 W of input power at 1.8–2.2 GHz with an input third-order intercept point over all phase states. The measured second and third harmonic components are at 30 dBm of RF input power. The application areas are in-phase shifters for micro and pico base-stations in the 1.7–2.3-GHz range.