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SIMS of Organic Materials—Interface Location in Argon Gas Cluster Depth Profiles Using Negative Secondary Ions

机译:有机材料的SIMS-使用负二次离子在氩气团簇深度剖面中的界面定位

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摘要

A procedure has been established to define the interface position in depth profiles accurately when using secondary ion mass spectrometry and the negative secondary ions. The interface position varies strongly with the extent of the matrix effect and so depends on the secondary ion measured. Intensity profiles have been measured at both fluorenylmethyloxycarbonyl-l-pentafluorophenylalanine (FMOC) to Irganox 1010 and Irganox 1010 to FMOC interfaces for many secondary ions. These profiles show separations of the two interfaces that vary over some 10 nm depending on the secondary ion selected. The shapes of these profiles are strongly governed by matrix effects, slightly weakened by a long wavelength roughening. The matrix effects are separately measured using homogeneous, known mixtures of these two materials. Removal of the matrix and roughening effects give consistent compositional profiles for all ions that are described by an integrated exponentially modified Gaussian (EMG) profile. Use of a simple integrated Gaussian may lead to significant errors. The average interface positions in the compositional profiles are determined to standard uncertainties of 0.19 and 0.14 nm, respectively, using the integrated EMG function. Alternatively, and more simply, it is shown that interface positions and profiles may be deduced from data for several secondary ions with measured matrix factors by simply extrapolating the result to Ξ = 0. Care must be taken in quoting interface resolutions since those measured for predominantly Gaussian interfaces with Ξ above or below zero, without correction, appear significantly better than the true resolution. >Graphical Abstract
机译:建立了一种程序,可以在使用二次离子质谱仪和负二次离子时准确定义深度轮廓中的界面位置。界面位置随基质效应的程度而变化很大,因此取决于测得的二次离子。在许多次离子的芴基甲氧基羰基-1-五氟苯丙氨酸(FMOC)与Irganox 1010以及Irganox 1010与FMOC界面上均已测量了强度分布。这些曲线显示了两个界面之间的间隔,其间隔大约在10 nm左右,具体取决于所选的次级离子。这些轮廓的形状主要受基质效应的控制,而长波长粗糙化则使其略微减弱。使用这两种材料的已知均质混合物分别测量基体效应。基质的去除和粗糙化效果为所有离子提供了一致的组成曲线,这些曲线由积分指数修饰的高斯(EMG)曲线描述。使用简单的集成高斯函数可能会导致重大错误。使用集成的EMG函数分别将成分分布图中的平均界面位置确定为标准不确定度0.19和0.14 nm。另外,更简单地,它表明可以通过简单地将结果外推到Ξ= 0,从几个次级离子的数据中推导出界面位置和分布,这些离子具有测量的基质因子。 Ξ高于或低于零的高斯界面(未经校正)看起来比真实分辨率好得多。 <!-fig ft0-> <!-fig @ position =“ anchor” mode =文章f4-> <!-fig mode =“ anchred” f5-> >图形摘要<!- fig / graphic | fig / alternatives / graphic mode =“ anchored” m1-> <!-标题a7->ᅟ

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