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The effect of free-standing GaN substrate on carrier localization in ultraviolet InGaN light-emitting diodes

机译:独立式GaN衬底对紫外InGaN发光二极管中载流子定位的影响

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摘要

In this study, we have grown 380-nm ultraviolet light-emitting diodes (UV-LEDs) based on InGaN/AlInGaN multiple quantum well (MQW) structures on free-standing GaN (FS-GaN) substrate by atmospheric pressure metal-organic chemical vapor deposition (AP-MOCVD), and investigated the relationship between carrier localization degree and FS-GaN. The micro-Raman shift peak mapping image shows low standard deviation (STD), indicating that the UV-LED epi-wafer of low curvature and MQWs of weak quantum-confined Stark effect (QCSE) were grown. High-resolution X-ray diffraction (HRXRD) analyses demonstrated high-order satellite peaks and clear fringes between them for the UV-LEDs grown on the FS-GaN substrate, from which the interface roughness (IRN) was estimated. The temperature-dependent photoluminescence (PL) measurement confirmed that the UV-LEDs grown on the FS-GaN substrate exhibited better carrier confinement. Besides, the high-resolution transmission electron microscopy (HRTEM) and energy-dispersive spectrometer (EDS) mapping images verified that the UV-LEDs on FS-GaN have fairly uniform distribution of indium and more ordered InGaN/AlInGaN MQW structure. Clearly, the FS-GaN can not only improve the light output power but also reduce the efficiency droop phenomenon at high injection current. Based on the results mentioned above, the FS-GaN can offer UV-LEDs based on InGaN/AlInGaN MQW structures with benefits, such as high crystal quality and small carrier localization degree, compared with the UV-LEDs on sapphire.
机译:在这项研究中,我们已经通过大气压金属有机化学法在独立的GaN(FS-GaN)衬底上生长了基于InGaN / AlInGaN多量子阱(MQW)结构的380 nm紫外发光二极管(UV-LED)。气相沉积(AP-MOCVD),并研究了载流子定位度与FS-GaN之间的关系。显微拉曼位移峰映射图像显示出低标准偏差(STD),表明生长了低曲率的UV-LED外延晶片和弱量子限制斯塔克效应(QCSE)的MQW。高分辨率X射线衍射(HRXRD)分析表明,对于在FS-GaN衬底上生长的UV-LED,高阶卫星峰和它们之间的清晰条纹可用来估计界面粗糙度(IRN)。温度相关的光致发光(PL)测量证实,在FS-GaN衬底上生长的UV-LED表现出更好的载流子限制。此外,高分辨率透射电子显微镜(HRTEM)和能量分散光谱仪(EDS)的映射图像验证了FS-GaN上的UV-LED具有相当均匀的铟分布和更有序的InGaN / AlInGaN MQW结构。显然,FS-GaN不仅可以提高光输出功率,而且可以减少高注入电流下的效率下降现象。基于上述结果,与蓝宝石上的UV-LED相比,FS-GaN可以提供基于InGaN / AlInGaN MQW结构的UV-LED,具有诸如高晶体质量和小的载流子定位度等优点。

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