离子束溅射薄膜压力传感器的动态特性

摘要

A mathematical modelling method is used to compare the dynamic characteristics of ion beam sputtered thin-film strain gauge pressure transducer and traditional bonded strain gauge pressure transducer.They have similar dynamic properties. But when excited by wide periodical-rectangle-wave pressure, the sample thin-film transducer gives a distorted response.On the basis of the mechanism analysis of the problem,the temperature rise of the measured medium caused by step pressure could lead to the wrong output.%用数学建模的方法将相同结构参数的离子束溅射薄膜压力传感器和粘贴式应变计压力传感器动态特性做比较，二者在瞬态特性上基本相同。但在宽脉冲方波气压激励下，所用溅射薄膜压力传感器出现响应失真现象。对问题的产生原因和机理进行分析，认为问题的产生原因可能在于方波压力上升沿导致的被测气体温度变化。