Ultra-Low Loss Films by Ion-Beam Sputtering for Novel Polymer and Glass Based Optoelectronic Devices

摘要

The purchased equipment was the Ionfab 300 Plus from Oxford Instruments. The Ionfab Plus Ion Beam System is configured for sputter deposition of high quality dielectric and metal oxide thin films for optical applications and for etching optical surfaces. The equipment has been an important tool in the OSC research and development of nano-structured optoelectronic components. Among them are electro-active waveguides for research in spectroelectrochemistry, dielectric multilayer stacks of active optical components, and integrated optical devices in glass and semiconductor materials.