一种差动输出石英谐振式力传感器研制

摘要

介绍了一种具有差动输出石英力传感器,该传感器由轮辐式弹性结构和2只石英力敏谐振器组成.利用分别位于正负应力区2只力敏元件感知作用力的大小,进而进行差动输出,以实现零点温漂与时漂自补偿.分析了弹性梁的结构特性；介绍了双端音叉石英力敏谐振器的结构、力学特性及力传感器的制作过程.对传感器进行了静态测试,结果表明:传感器测量范围为0 ～300N,静态精度为0.05％.%A quartz force sensor with differential output has been developed. It consists of a spoke elastic structure and two quartz resonant force sensing devices. One is arranged at positive region, another is arranged at negative region. They sense force and make up of differential output signal to realize zero thermal and time shift self compensation. The structure character of elastic beam is analyzed. The double terminal force device performance, and the process of manufacture is introduced. The result shows that the sensor' s measurement range is 0 ~300 N, statistic precise is 0. 05 % .