基于聚酰亚胺基底的热剪切应力传感器设计

摘要

设计了一种基于柔性MEMS技术的双热线结构剪切应力传感器,可以实现曲体表面上二维剪切应力的矢量测量,对于实现流场的主动控制具有重要的意义.介绍了双热线热剪切应力传感器及其阵列的原理和结构设计；通过有限元仿真分析对器件的尺寸参数进行了优化设计；利用MEMS工艺制作方法,实现了信号背线引接技术,减少了对流场的干扰.实验结果表明:工艺流程设计和器件参数设计合理,传感器阵列具有良好测试性能.%A shear stress sensor array with double hot-wire based on flexible MEMS is presented,which can be applied to measure two-dimensional (2D) shear stress on curved surface and has an important significance for achievement of active control of flow field.introduces Principle and structure design of double hot-wire thermal shear stress sensor and its array;size parameters of the device are optimized by finite element simulation analysis.By MEMS technology,signal electrical bond pads are located at the backside and interference on flow field is reduced.The experimental results demonstrate that the process and device parameters design are reasonable,and the sensor array has good capability of measurement.