NiCrAlY薄膜应变计的研制

摘要

NiCrAlY thin film strain gauges are deposited on the nickel-based superalloy by radio-frequency magnetron sputtering. The effects of stabilized heat treatment at 1 000℃ on structure and surface morphology of NiCrAlY thin films are investigated and the electromechanical properties of NiCrAlY thin film strain gauges are measured. After stabilized heat treatment at 1 000℃,a layer of Al2 O3 is formed on the surface of NiCrAlY thin film,which is important cause for excellent high-temperature oxidation resistance. The variation of strain gauge resistance with temperature is linear in the temperature range from room temperature to 800℃. The temperature coefficient of resistance( TCR) is about 290 × 10-6/℃,and gauge factor( GF) is about 2. 1 at room temperature.%采用射频磁控溅射法在Ni基高温合金拉伸件上制备NiCrAlY薄膜应变计。研究了热稳定处理对NiCrAlY薄膜结构、表面形貌的影响，并且测试了NiCrAlY薄膜应变计的电学与应变性能。结果表明：热稳定处理后 NiCrAlY 薄膜应变计由于在表面形成了一层 Al2 O3膜，具有抗高温氧化的特性，在室温～800℃范围内，应变计电阻同温度呈线性变化，电阻温度系数（ TCR）约为290×10－6/℃，室温下的应变计系数（ GF）为2.1。