基于FPGA的平面螺旋电感式微位移传感器系统

摘要

基于平面螺旋电感和现场可编程门阵列（ FPGA）技术，系统设计了一种以频率为输出的电感式微位移传感器，实现了电感式传感器的数字化输出与检测。系统主要由位移/电感转换模块、电感检测电路、差频模块、FPGA四部分组成，并在FPGA系统中搭建NIOSⅡ软核，对采集所得数据进行处理。实验证明：系统具有灵敏度高，温度稳定性好等特点，其测量范围为0～15 mm，在0～6 mm 范围内，最大误差为0.03 mm，分辨率达到10μm。%Design an inductive micro-displacement sensor whose output is frequency signal,based on planar spiral inductor and FPGA technology,and it realizes digitalized output and measurements. The system consists of displacement-inductance converter module,inductive detection circuit,frequency-subtracting module and FPGA system. In addition,it builds up soft core of NIOSⅡin FPGA system to process the acquired data. Experimental results show that this system has characteristics of good temperature stability and high sensitivity whose measuring range is 0~15mm,the maximum error is 0. 03 mm and resolution is 10μm in the range of 0~6 mm.