基于FPGA的多路微位移精确监控系统设计

摘要

A design of precious monitoring system based on FPGA was put forward for real-time collection and analysis of micro-displacement in MEMS.The system used FPGA of Cyclone II series as the main chip to control multiple ADS 1251 data collection, and high-precision capacitance sensor as displacement sensitive component was used .Multi-channel data packages was sent to PC via UART communication mode to achieve to micro-displacement precisely monitoring from -4.33μm to 4.33μm Multisim12.0 and QUARTUS II 9.0 simulation show that the system stability is good, and the resolution achieves 8.26 pm and monitoring error is less than 0.6%.%文中提出了一种基于FPGA的精确监控系统设计方法，应用于微机电系统（MEMS）中微位移信号的实时采集分析。系统采用高精度电容传感器作为位移敏感元件，使用CycloneⅡ系列的FPGA作为主控芯片，实现对多块模数转换芯片ADS1251的分时采集控制。将多路数据打包通过UART通信模式发送至PC机，实现－4．33～4．33μm微位移的精确监控。经Multisim12．0和QUARTUSⅡ9．0仿真验证表明：系统稳定性良好，微位移分辨率达到16．52 pm且监测误差小于0．6％。