基于MEMS技术的F-P腔滤波器分析与设计

摘要

通过对微光纤法布里—珀罗(F-P)腔滤波器工作原理的综合分析,确立了微F-P腔滤波器静电驱动腔长调谐方案.对可调谐滤波器的主体部分进行光学设计和分析,确立了反射镜的多层薄膜光学结构,并借助ANSYS有限元力电耦合分析,最终选择L型桥臂支撑的腔体结构,可以实现0.625μm的调谐范围;保持桥面平行的能力很高,可实现高精度的滤波效果;结构稳固,能够抵抗制造时的残余应力.%By comprehensive analysis on working principle of micro F-P cavity filter,the optimum tuning scheme of micro F-P cavity filter is established. The main part of the optical structure is designed,a multilayer film structures of the mirror is established,and with the help of ANSYS finite element electro-mechanical coupling analysis,L type bridge arm supported cavity structure is finally established,the structure can achieve a considerable range of tuning 0. 625μm;relatively high fill factor,filter light leakage is avoided;the high ability to keep parallel can achieve high precision filtering effect;structural stability can resist the residual stress of manufacture.