基于QCM的湿度传感器等效电路模型研究

摘要

基于石英晶体微天平(QCM)的湿度传感器是一种以石英晶体为核心元件的新型高灵敏度传感器.根据气相中晶体振荡电路的起振和稳定条件,对晶体表面敏感薄膜吸附水分时等效电路参数的变化进行建模,得到了一种新型的基于QCM的湿度传感器等效电路模型.通过电路仿真软件PSPICE对模型进行仿真,并搭建QCM湿度传感器实验测量平台,结果验证了基于QCM的湿度传感器等效电路模型的有效性和正确性,对QCM湿度传感器的振荡电路的进一步设计和优化具有指导意义.%Quartz crystal microbalance (QCM )-based humidity sensor is a new type of high sensitivity sensor based on quartz crystal as the core element of oscillator circuit. According to the oscillation startup and stable condition of QCM in the gas phase,the model for equivalent circuit parameter changes while senstive film coated on QC absorbing moisture is established,and a new equivalent circuit model for humidity sensor is obtained. The model is simulated to demonstrate the correctness and effectiveness of the model by using PSPICE software,which is carried out by an experimental platform for QCM-based humidity sensor. It will have certain instructional significance on the design and improvement of oscillation circuits of QCM humidity sensor.