直线电机定位过程中扰动抑制策略研究

摘要

在超精密伺服运动领域,直线电机做定位运动时,控制性能易受到扰动的影响.首先对直线电机定位过程中的扰动进行了分析,然后提出了一种基于扰动观测器的扰动抑制策略,并通过建立仿真模型,验证了抑制策略的有效性,最后搭建了实验平台,验证了基于扰动观测器的扰动抑制策略.%When linear motor does positioning movement in the field of ultra-precision servo motion,the control performance is susceptible to disturbances.Above all,the disturbances of during positioning process of linear motor are analyzed and then a disturbance rejection strategy based on disturbance observer is presented.Also the effectiveness of rejection strategy is verified by establishing the simulation model,and finally a disturbance rejection strategy based on disturbance observer is verified by building an experimental platform.