复杂结构微晶玻璃光学零件化学抛光技术

摘要

A method is proposed to solve the problem of polishing the grooves and channels of matrix of Ring Laser Gyro (RLG). Both the glass-ceramic composition and chemical polishing mechanism are analyzed. Meanwhile, the technical solution, work flow and operation method are given. The result shows that the roughness and the transmittance of the surface, polished by the mixed solution of NH4HF2, H2O and additive, can reach 0.2 ～ 0.3 pm and 88 ~ 90% respectively. At the same time, the chemical polishing etching depth is 0-100 urn, realizing the "certainty" polishing to complex components.%针对激光陀螺光学腔体这种复杂结构的光学零件,采用传统的光学抛光的方法无法对其凹槽、孔道进行抛光的问题,提出了一种采用化学溶液对玻璃进行侵蚀的化学抛光技术.本文分析了微晶玻璃的组成及化学抛光的机理,制备了适合的化学抛光溶液,设计了抛光技术方案、工艺流程及方法.对化学抛光后的光学表面进行了测试、分析,结果表明:采用NH4HF2、H2O、添加剂组成的化抛溶液,抛光后能够得到光滑、透明玻璃表面,抛光表面的粗糙度可达0.2～0.3μm,可见光透过率88％～90％,化学抛光去除量为0～100чm,本研究实现了复杂结构的光学零件的“确定性”化学抛光.