基于0.13μm CMOS工艺的时间内插时间数字转换器设计与测试

摘要

[Background] Time-of-flight measurement is a basic method to identify charged particles in high-energy physics experiments. [Purpose] This paper aims to realize time measurement resolution of flight time detectors in high-energy physics experiments within 50 ps. [Methods] Based on the 0.13 μm complementary metal oxide semiconductor (CMOS) process, we designed a single-cycle time to digital convertor (TDC) as a fine counting module in time interpolation and built a closed-loop test system. [Results] Through analysis of measured data, we designed the comparison test under the same conditions, and found the source of TDC scale heterogeneity, and proposed the corresponding calibration method. [Conclusion] The resolution of TDC after calibration is up to 57 ps and the accuracy is better than 40 ps.%针对高能物理实验中飞行时间探测器的时间测量高精度需求,基于0.13 μm 互补金属氧化物半导体(Complementary Metal Oxide Semiconductor, CMOS)工艺设计了一种可应用在时间内插法中作为细计数模块的单周期时间数字转换器(Time to Digital Convertor, TDC),并为测试设计了一个闭环测试系统.通过实测数据分析,在相同的条件下设计对比试验,寻找TDC刻度非均匀性的来源,并给出相应的校准方法.测试结果表明:校准后TDC的分辨率达到57 ps,精度好于40 ps,达到了预期的设计目标.