基于ADAMS的硅片传输机器人轨迹规划及仿真

摘要

为了提高硅片传输机器人运动的平滑性,采用5次均匀B样条插值方法进行轨迹规划,并利用两种遗传算法对轨迹进行优化.以硅片传输机器人为研究对象,基于ADAMS软件对机器人进行轨迹仿真分析.结果表明,自适应混合遗传算法与自适应遗传算法相比,具有较好的局部搜索能力,能够得到性能更好的解.获得的轨迹具有脉动连续的特点,有利于提高机器人在运动过程中的轨迹跟踪精度.%In order to improve running smoothness of wafer-handling robot, uniform B-splines of five degree is exploited in order to get joint trajectories. Two kinds of genetic algorithm are proposed to solve the optimization problem. Simulation analysis is implemented based on ADAMS. The results show that the algorithm above used can improve the solution quality. The trajectories generated by the proposed planner have the advantage of continuous jerk, can improve the trajectory tracking accuracy in the moving process.