非球面光学零件研抛加工后，易产生毛刺、尖点和高频划纹等现象。为了提高光学零件的表面质量，在分析了精密研抛机床加工特点的基础上，提出了基于粘滑运动和重复控制相结合的Z轴控制策略，建立粘滑运动控制系统模型。根据加入粘滑运动后Z轴特性，采用重复控制来提高控制精度；并通过仿真进行对比分析。结果表明，采用粘滑运动和重复控制相结合的控制策略，可以提高Z轴的跟踪精度，进而可以有效消除影响工件表面质量的不良因素。%It is easy to produce the phenomenon such as burrs, cusp and high frequency lines , after lapping and polishing the aspheric optical parts. In order to improve the surface quality of the optical parts, on the a-nalysis of the processing characteristic of the ultra-precise polishing machine, the control strategy of the Z axis based on combination of stick-slip motion and repetitive control is proposed and mathematical model of stick-slip motion is established. According to the characteristic of the Z axis with stick-slip motion, repetitive control is used to improve the control precision; and a comparison simulation is made to analysis. The re-sults show that the tracking accuracy can be improved by the control strategy of combinating stick-slip mo-tion and repetitive control. Furthermore, the harmful factors affecting the surface quality of the workpiece can be effectively eliminated.
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