基于数值模拟的超精密静压导轨静态特性分析∗

摘要

为了有效解决超精密静压导轨静态特性实验分析的难题，文章提出了一种基于ANSYS Work-bench的静压导轨数值模拟方法。首先采用FLUENT模块完成流场分析，得到流体域的压力分布；然后采用积分法得到油膜面的承载力，在此基础上采用逐差法得到油膜面的刚度值；接着分析了节流孔直径、供油压力及油膜间隙对承载力及刚度特性的影响规律；最后将流体域油膜面的压力分布耦合到固体域的运动滑块上进行流固耦合分析，得到导轨运动滑块在流场压力及外部载荷作用下的应力、应变等静力特性，完成了静压导轨的强度校核。%In order to overcome the difficulty of experimental analysis of static characteristics for ultra-preci-sion hydrostatic guideway. A new numerical simulation method to analyze static characteristics was proposed in this paper based on ANSYS Workbench. First, pressure distribution of fluid domain was calculated by u-sing the FLUENT module. The load capacity of oil film surface was achieved by the integral of pressure, the stiffness was achieved by method of successive minus. Then, the effect of the thickness of oil film, ori-fice diameter and supply pressure on the stiffness and load capacity was considered. Finally the deformation and stress of sliding block was achieved by the method of fluid-structure interaction, strength check was pro-cessed by using the Static Structure analysis module.