MOCVD法制备GaN基LED外延尾气处理技术进展

摘要

MOCVD(金属有机物化学气相外延)法制备LED外延技术产生的尾气危害较大,需要进行处理才能排放.针对尾气的不同组分,对现有的几种尾气处理技术进行分析,指出各自存在的缺陷和弊端.从回收利用和节能减排两个角度出发,在原有方法的基础上进行研究改进,提出碱土金属氯化物吸附法和间接燃烧法两种新型尾气处理技术,实现了氨气的回收利用,降低处理过程中的原料投入与能源消耗,并归纳总结了行业内尾气处理与排放所面临的问题及挑战.%The exhaust in LED epitaxial preparation by MOCVD (metal organic chemical vapor phase epitaxy) has great harm,which needs to be treated before discharge.Several existing technologies of gas treatment was analyzed for different components of the exhaust,and the defects and shortcomings of each method was pointed out.Starting from the two angles of recycling and energy saving,the original methods was improved based on the study.Adsorption of alkaline earth metal chloride method achieved the recycling of ammonia,and the indirect combustion method reduced the raw material inputs and energy use.At last,the problems and challenges faced by industry in the exhaust treatment were summarized.