非制冷红外焦平面探测器热敏薄膜技术研究进展

摘要

近年来红外探测技术在军事和民用领域得到了迅速的发展,非制冷红外探测器以其低成本、小型化、非制冷等优势在红外探测系统发展中占据着重要的地位.本文总结了国内外非制冷红外探测器的发展现状,分析了两种主要的非制冷红外探测器技术路线的特点及差异,并给出了这两种技术路线后续发展趋势.%In recent years,uncooled infrared detecting technology has obtained a rapid development in both military and civilization fields.As uncooled infrared detector has the characteristics of low price and small size,it plays an important role in the development of infrared detecting system.The development status about domestic and foreign uncooled infrared detector was summarized,and the feature and difference of two main types of uncooled infrared detector (VOx and α-Si) were compared and analyzed.Finally development trend of this technology is pointed out.