Antenna-Coupled Uncooled Infrared Focal Plane Arrays: In-house Fabrication.

摘要

Under the support of the subject DURIP grant, University of Central Florida CREOL has developed an in-house capability for direct-write electron- beam fabrication of the microantenna coupled infrared sensors being investigated for contract to BMDO. The facility developed has resulted in shorter turn-around times for exploration of new device designs while giving a greater degree of process control. Establishment of this facility at CREOL has provided a cost- effective means for prototype device development for infrared focal-plane array applications.