声表面波瓦斯传感器高压电薄膜研究

摘要

The methane accidents frequently occur in coal mines of China, and many people were injured or killed, and national assets were lost. Surface acoustic wave sensors for methane are so small, stable that they can effectly improve the conditions of coal mines. The sensitivity of SAW methane sensors depend mostly on the piezoelectricity and the mechanical quality of piezoelectric thin films, and so high piezoelectric thin films with high quality factor are very important for SAW methane sensors. In this research, the PMnN-PZT ternary compound thin films are deposited by magnetic control sputtering method, and the films own high piezoelectricity and quality factor, which is available for the SAW methane sensors fabrications.%我国煤矿瓦斯事故频发,造成大量人员伤亡和国有资源流失.声表面波瓦斯传感器体积小、工作稳定,能够有效提高煤矿瓦斯监、检能力,减少瓦斯事故.声表面波瓦斯传感器的灵敏度主要取决于压电薄膜的压电系数及机械品质因数,因而高压电系数、高机械品质因数的压电薄膜对于制备高性能声表面波瓦斯传感器具有重要意义.文中通过磁控溅射法沉积PMnN-PZT三元系铁电薄膜,所得薄膜具有高压电性及较高的机械品质因数,有望应用于声表面波瓦斯传感器制备.