基于非硅表面微加工技术,设计并制造一种新型三维多方向敏感的微惯性开关.选用弹簧-质量块-阻尼的典型碰撞结构,主要由可动电极悬臂梁弹簧-质量块系统、水平固定电极、垂直复合柔性固定电极三部分组成.利用ANSYS有限元软件对器件进行模态和动力学碰撞仿真分析,并对该微机械惯性开关进行落锤冲击试验,结果表明,在水平和竖直方向的阈值均为50 ～60 g,接触时间可稳定在40μs以上.%Based on non-silicon surface micromachining technology, a novel three-dimension micro inertial switch with multidirectional-sensitive property has been designed and fabricated. Using typical mass-spring-damper model, the switch mainly consists of mobile electrode ( mass) with beam spring, flexible fixed planar electrode and vertical electrodes. By finite element simulation, modal analysis of the device was made to determine the natural frequency of the device; and dynamic collision simulation of the device was made to verify the working principle. Micro-switches fabricated were tested by using drop weight method. The results show that the threshold acceleration distributes between 50g and 60g, which basically fulfills the requirement of being close to the expected value of 60g; and the response time to 1 ms half-sine shock is above 40 s.
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