Design and fabrication of a laterally-driven inertial micro-switch with multi-directional constraint structures for lowering off-axis sensitivity

摘要

This paper proposes a novel laterally-driven inertial micro-switch with multi-directional compact constraint structures for lowering off-axis sensitivity and improving shock-resistibility. The design utilizes constraint sleeve and reverse stop-block structures to limit too much displacement of proof mass in the micro-switch and avoid damage to the device under a high shock load. The dynamic contact simulation indicates that the designed inertial micro-switch can limit the movement of proof mass and lower the off-axis sensitivity by constraint sleeve and reverse block structures. The first collision response time between proof mass and constraint structures in the z-direction has been analyzed theoretically and simulated, which have indicated that the collision response time mainly depends on geometric parameters, applied shock acceleration amplitude and the inherent frequency of the mass-spring inertial system. Simulated dynamic response curves under applied reverse directional shock accelerations show the proposed inertial micro-switch also has a good shock-resistibility. The inertial micro-switch fabricated by surface micromachining technology has been evaluated using a drop hammer system. The test results indicate that spurious triggering is more likely to occur in the inertial micro-switch without constraint structures, and the designed constraint structures can effectively lower the off-axis sensitivity and improve the shock-resistibility.