The design and experiment of MEMS the safety and arming (S&A) device are complex be-cause of the small space in the fuze .Based on Ansys simulation software ,a new method was employed for the reliability analysis of key component in S&A device .Working principle of the MEMS S&A de-vice was described first ,the deformation characteristic and overload factor were studied via dynamic simulation test ,the fatigue environment was simulated when shock and vibration were loaded ,the re-lationship between the stress and displacement was discussed through accelerated stress experiment ;a typical MEMS micro -spring failure mode was reproduced and the failure mechanism was analyzed , finally the experimental results illustrate that the elastic coefficient is 193 N/m ,and the relative mea-surement error is 5 .02% ,which is in high accuracy .The conclusions provide theoretical evidence for the design and reliability of the MEMS spring for deep research .%由于引信可利用空间有限，M EM S 安全保险机构从试验到设计过程都非常复杂．为了确保安全机构各个功能件能够可靠作用，提出了一种利用 Ansys有限元软件对安全机构中重要部件微弹簧的分析试验的方法．通过动态特性仿真试验，对微弹簧的形变特性和过载等衡量可靠性的指标进行了分析研究，模拟了冲击及振动载荷的失效环境，借助加速应力试验激发微弹簧失效的出现，得到了失效环境下应力及位移的相互关系；实现了对 M EM S 微弹簧典型的失效模式及其失效机理的分析研究．试验计算得到的弹性系数为193 N/m ，与理论值之间的平均相对误差为5．02％，精度较高，为引信 M EM S 弹簧进一步的优化设计和可靠性研究提供了理论支撑．
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