In this paper, we design an L-shaped MEMS microspring. The formula for the spring constant and the stress distribution of the microspring are worked out in theory, which are proved correctly by FEM (Finite element method) simulation. Four L-shaped microsprings named as #1, #2, #3, #4 with different dimensions are fabricated. The tensile experiment and FEM also show that the fractured positions are all located in the corner of the microspring. And each stage of deformation of the microspring is the same, which is proved by the image captured by CCD during the tensile experiment. When the microspring is applied to a shock load, the upper end of the microspring has a much larger deformation than others, which is different from that of the static load. It offers reference for latter MEMS microspring design.
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