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A study on the elastic coefficients of setback micro-springs for a MEMS safety and arming device

机译:用于MEMS安全装置的挫折微弹簧弹性系数的研究

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摘要

This paper analyzed the effects of setback micro-springs on a MEMS safety and arming (S&A) device. To make up for defects related to current methods of obtaining the elastic coefficients of micro-springs, a computational formula for the elastic coefficients of S-shaped micro-springs was developed in accordance with Castigliano's second theorem and Hooke's law and verified for three types of setback micro-springs with different structures through finite element simulations and a self-designed testing system for the elastic coefficients of micro-springs. The testing values and the simulation values were in good agreement with the theoretical values. The results indicate that the precise measurement and calculation of the elastic coefficients of micro-springs in the transverse, longitudinal and vertical directions can be realized with the method presented in this paper. For the S-shaped setback micro-spring, the elastic coefficient in the transverse direction is the smallest and the most prone to fracture and plastic deformation. In the design of MEMS S&A devices, priority should be given to applying the deformation of the micro-spring in the longitudinal and vertical directions.
机译:本文分析了挫折微弹簧对MEMS安全和臂(S&A)装置的影响。为了弥补与获取微弹簧的弹性系数的电流方法相关的缺陷,根据Castigliano的第二定理和Hooke的定律开发了S形微弹簧的弹性系数的计算公式,并验证了三种类型的具有不同结构的挫折微弹簧通过有限元模拟和用于微弹簧的弹性系数的自设计测试系统。测试值和模拟值与理论值吻合良好。结果表明,通过本文呈现的方法,可以实现横向,纵向和垂直方向上微弹簧的弹性系数的精确测量和计算。对于S形挫折微弹簧,横向的弹性系数是最小,最容易骨折和塑性变形。在MEMS S&A器件的设计中,应优先考虑在纵向和垂直方向上施加微弹簧的变形。

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  • 来源
    《Microsystem technologies》 |2020年第2期|共11页
  • 作者单位

    Northeastern Univ Sch Mech Engn &

    Automat Shenyang 110819 Peoples R China;

    Northeastern Univ Sch Mech Engn &

    Automat Shenyang 110819 Peoples R China;

    Shenyang Ligong Univ Sch Mech Engn Shenyang 110159 Peoples R China;

    Shenyang Ligong Univ Sch Mech Engn Shenyang 110159 Peoples R China;

    Shenyang Ligong Univ Sch Mech Engn Shenyang 110159 Peoples R China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 微电子学、集成电路(IC);
  • 关键词

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