MEMS microdetonator/initiator apparatus for a MEMS fuze

摘要

A MEMS apparatus having a substrate layer, a device layer and an intermediate oxide layer joining them. A slider is formed in the device layer and includes an enlarged end portion. A walled chamber having a hollow interior in which is positioned a microdetonator is formed in the substrate layer beneath the enlarged end portion and is secured to it by the oxide layer. A drive is operable to move the slider, and with it, the walled chamber, from an initial position to a final position. When in the final position an initiator is operable to initiate the microdetonator.