Integration design of a MEMS based fuze

摘要

Highlights?Design, fabrication and testing of a novel MEMS fuze is presented.?MEMS detonator, Safety-and-Arming device and MEMS encapsulation are fabricated separately and then assembled to meet different requirements.?The fabrication process and experiments of MEMS fuze are reported.AbstractThe design, fabrication and test of a novel MEMS fuze are presented in this paper. It is a multilayer stacked device: the bottom layer is the MEMS detonator, which can generate a high speed slapper (4088m/s) when initiated by 2500V surge voltage. The middle layer is the SA (safety and arming) device. With proper driven voltages, the SA device can generate 508.98μm output displacement and realize changing safety mode to arming mode in 16ms. The top layer is the MEMS encapsulation, which is integrated with the position limiting structure and energetic grain. 3D printing process and laser process are introduced during the whole fabrication process, and the total size of the device can be minimized into 15mm×17mm×5mm s