真空电镀制备非连续合金薄膜及其在电磁屏蔽中的应用

摘要

采用真空电镀工艺在塑料基底上制备了非连续合金薄膜.系统研究了沉积条件的改变对薄膜的表面形貌、微观聚集态特征、薄膜导电性能的影响,并对相应薄膜体系用于电磁屏蔽的效能进行了对比研究.发现在高能离子的参与下,沉积到塑料基底上有机涂层表面的金属原子(团)会渗入涂层内部与有机介质混合,形成非连续金属相,相应的薄膜表面也出现不同的微结构.实验表明,金属层总厚度不超过500nm时其平均电磁屏蔽性能可到50dB.该复合材料以及制备方法可应用于多种有电磁屏蔽需求的产品.%Discontinuous alloy films were grown by vacuum electroplating on plastic substrate. The effects of growth conditions, such as deposition time and ionization of Ar on the morphologies, microscopic aggregation, conductivity characteristics and electromagnetic shielding efficiency of alloy films were investigated. It indicated that the presence of high-energy ions made the metallic atoms penetrated into the organic layer, forming discontinuous metallic phase. Correspondingly, varying microscopic characteristics could be observed on film surface. The results show that the average electromagnetic shielding efficiency of alloy films at a thickness no more than 500nm could be 50dB within a frequency band 1.2-2. 4GHz. The complex materials and technique used in this study are applicable for the products with the requirement of electromagnetic shielding.