以氯化锌和异丙醇铝为原料,异丙醇为溶剂,采用非水解溶胶-凝胶法制备了铝掺杂的氧化锌纳米粉体.利用X射线衍射仪(XRD)、场发射扫描电子显微镜(FESEM)分析了产物的晶体结构和形貌,并测试了其气敏性能.实验结果表明,铝掺杂的氧化锌纳米粉体属于六方纤锌矿结构,铝掺杂量为1.5％时该材料对甲醛气体具有较高的灵敏度.工作温度为260℃时,对500 ppm甲醛气体的灵敏度可达12.07.同时,该材料还具有较好的响应-恢复特性,响应时间和恢复时间分别为18 s和12 s.在50-2000 ppm的甲醛气体范围内,随着甲醛浓度增大,材料的灵敏度呈上升趋势.%Al-doped ZnO nanoparticles were prepared by non-hydrolytic sol-gel method using zinc chloride and aluminium isopropoxide as raw materials in isopropanol solvent. X-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM) were employed to characterize the phase composition and the microstructure of the resulting products, and their gas sensing properties were also measured. The experiment results show that the Al doped ZnO nanoparticles have hexagonal wurtzite structure. The prepared sensor exhibits the highest sensitivity with the 1.5 at％ Al-doped ZnO, as 12.07 for 500 ppm formaldehyde at 260 oC. Moreover, it also presents quick response and recover behavior, about 18 s and 12 s, respectively. And the sensitivity of the gas sensor gradually increases with the formaldehyde concentration increasing in the range of 50 to 2000 ppm.
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