SiC反射镜表面改性研究进展

摘要

It is a hotspot using SiC ceramic as mirror at present. When SiC ceramic is used as mirror, there exist various defects. Surface modification must be done on the SiC mirror. The methods of surface modifica-tion, the mechanism of preparation, the disadvantages and advantages are summed up in the paper. Two as-pects of cost-effectively and large-scaled are finally prospected in developing SiC mirror.%采用SiC陶瓷作反射镜是目前国际上的一个研究热点。但是SiC陶瓷用作反射镜时存在各种类型的缺点，必须对SiC反射镜表面进行改性。本文综述了各种表面改性方法、制备机理以及优缺点，最后展望了未来SiC反射镜的发展方向：即低成本化和大型化。