提出了一种工作在扭转模态的微机械谐振器,与传统的弯曲模态相比,扭转模态能量损耗低,更适用于液相检测.通过ANSYS仿真优化了结构,针对液相中阻尼较大的特点设计可输出大电流的驱动电路,并根据扭摆的输出与速度相关的特点设计了能量补偿电路,此电路可对能量损失进行有效的补偿,扭摆在液相中的品质因数由2.65提高到了40.%A novel MEMS resonator working in the torsional mode was presented. As the energy loss of the torsional mode is lower compared to the conventional flexural mode,it is more suitable for working in the liquid. The structure was optimized by ANSYS simulation software. As the damping and the required driving force in liquid is large, the high-current drive circuit was designed; the energy compensation circuit was designed according to the feature that the resonator output was related to speed. The experiments show that the circuit can effectively compensate the energy lass, and the resonator Q-factor in liquid phase was improved from 2, 65 to 40.
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