基于多轴加速度计的构成方式,提出了一种新型的三轴向梳齿式电容加速度计.内部支撑梁与外部可动电极相连接的结构,在体积相同的条件下,增加了输出电容;采用完全对称结构,支撑梁与电极板等厚,增加稳定性的同时提高了抗过载能力;完全对称的梳齿分布,避免了水平向加速度的相互干扰;可动齿与不动齿的不对称结构,避免了水平向对z轴向的干扰.利用MEMS专业有限元软件ConventorWare对其进行静态分析、抗过载分析和模态分析,此加速度计在满量程状态下能安全工作,工作频率为94.1 kHz.%Based on the composition of multi-axis accelerometer, a new type of three-axis comb-type capacitive accelerometer was proposed. Internal and external support beam that connected to the movable electrode structure can increase output capacitance when they are the same volume. When the support beam and the electrode plate are the same thick and have a completely symmetrical structure,it can improve its resistance to overload and increase stability. The completely symmetrical comb distribution can a-void the level acceleration to mutual interference. The asymmetry of moving comb and fixing comb structure can avoid the level of Z axis to interference. It used MEMS professional finite element software ConventorWare to analyze the static,the overload resistance and the modal,the accelerometer can work securely in full-scale state and its operating frequency is 94. 1 kHz.
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