硅微热板气体传感器应力调节系统设计与仿真

摘要

将微热板与静电梳齿执行器结合，设计出一种恒温加热状态下调节气敏薄膜（ SnO2）应力的系统结构。采用有限元软件（ COMSOL Multiphysics）仿真分析了不同温度下器件的形变、气敏薄膜中的应力分布及其调节范围。仿真结果表明，气敏薄膜中的应力随着静电梳齿执行器驱动电压的升高而下降，成功实现对气敏薄膜中应力分布的调节，该结构可用于应力对薄膜气敏特性影响的研究。%A system combined the microhotplate and the comb electrostatic actuator was proposed which can modulate the stress distribution in gas sensing film and maintain the same temperature at the same time.The deformation of the device,stress dis-tribution in sensing film and the modulation range were simulated by FEA software ( COMSOL Multiphysics) .It is shown that the stress in sensing film decrease with the increasing of the drive voltage.The modulation of the stress in sensing film can be attained by the proposed structure,which can be used to study the influence of stress on the properties of gas sensing film.