SILICON-BASED MICROFLOW SENSOR FOR GAS ANALYSIS AND METHOD FOR PRODUCTION THEREOF SILIZIUM-BASIERTER MIKROSTRÖMUNGSFÜHLER FÜR DIE GASANALYSE UND VERFAHREN ZU DESSEN HERSTELLUNG

摘要

The present invention relates to a microflow sensor to measure the rate of flow of a flowing medium.  The invention is characterized in that two meander-structures (5, 6) consisting of silicon are formed.  The use of these two meander structures (5, 6) is particularly advantageous together with two supplemental resistors, so that a Wheatstone bridge is formed.  With this kind of microflow sensor the sensitivity of the sensors is to be improved, the response times reduced and the signal-to-noise ratio increased.