基于氢敏材料检测氢气浓度的工作原理,针对合金薄膜型氢气传感器加热电阻小、达到最佳工作温度时间长等特点,设计了一种低功耗合金薄膜氢气传感器.利用有限元分析软件ANSYS Work-bench对该结构进行了热分析,结果表明,该种结构在加热功耗为0.2 W,总功耗为0.8 W时,能够短时间内将该氢气传感器加热到最佳工作温度.根据MEMS技术制备了合金薄膜型氢气传感器,实验结果与理论分析具有很好的一致性.该研究为薄膜型氢气传感器的低功耗设计与微小型封装提供了重要依据.%Based on the principle of using hydrogen sensitive material to test the hydrogen concentration ,aiming to the char-acteristics of small heating resistance ,long time to reach ideal working temperature ,etc,an alloy thin film hydrogen sensor with low power consumption was presented .This structure was simulated with thermal analysis by the finite element analysis software ANSYS Workbench ,the result indicates that when heating power is 0.2 W and total power consumption is 0.8 W,the structure makes hydrogen sensor satisfy optimum operating temperature in a short time .The hydrogen sensor was prepared by MEMS tech-nology,and experimental results were in very good agreement with theoretical analysis .This study provides important basis for the low power design and miniaturized package .
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