薄膜型钯-铬合金氢气传感器技术研究

摘要

This paper presented a hydrogen sensor using Pd/Cr sensing material,and the hydrogen sensor was prepared by MEMS technology. The testing results indicate than this hydrogen sensor can realize concentration form 0 to 4% hydrogen detection, this sensor has linear-output characteristic, and it has better response characteristic and higher recoveries.%文中介绍了采用Pd-Cr合金作为氢敏材料,利用MEMS加工技术制备薄膜型氢气传感器.测试了传感器对0～4％浓度范围氢气的敏感特性,结果显示,传感器对0～4％氢气浓度具有良好的线性输出特性,并表现出较高的响应灵敏度和较好的响应重复性.