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THIN-FILM-TYPE HYDROGEN GAS SENSOR

机译:薄膜型氢气传感器

摘要

PROBLEM TO BE SOLVED: To provide a hydrogen gas sensor allowing stable voltage output even if the temperature changes.;SOLUTION: The thin-film-type hydrogen gas sensor includes a resistor made of a platinum thin film on the top surface of an insulator substrate, and detects the concentration change of hydrogen gas by detecting the change in resistance of the resistor. The gas sensor includes: a first resistor whose resistance changes due to contact with the hydrogen gas; and a second resistor whose resistance changes less than the first resistor due to contact with the hydrogen gas. By connecting the first resistor to the second resistor in series, a thin-film-type hydrogen gas sensor for detecting the concentration change of the hydrogen gas on the basis of the voltage output due to the difference between the resistance values is provided.;SELECTED DRAWING: Figure 8;COPYRIGHT: (C)2016,JPO&INPIT
机译:解决的问题:提供一种即使温度变化也能稳定输出电压的氢气传感器;解决方案:薄膜型氢气传感器在绝缘体基板的顶面上包括由铂薄膜制成的电阻器,并通过检测电阻器的电阻变化来检测氢气的浓度变化。该气体传感器包括:第一电阻器,该第一电阻器的电阻由于与氢气的接触而改变。第二电阻,由于与氢气接触,其电阻变化小于第一电阻。通过将第一电阻器与第二电阻器串联连接,提供了一种薄膜型氢气传感器,用于根据由于电阻值之间的差异而产生的输出电压来检测氢气的浓度变化。图:图8;版权:(C)2016,JPO&INPIT

著录项

  • 公开/公告号JP2016075597A

    专利类型

  • 公开/公告日2016-05-12

    原文格式PDF

  • 申请/专利权人 OKAYAMA UNIV;

    申请/专利号JP20140206664

  • 发明设计人 KIWA TOSHIHIKO;TSUKADA KEIJI;SAKAI KENJI;

    申请日2014-10-07

  • 分类号G01N27/12;

  • 国家 JP

  • 入库时间 2022-08-21 14:47:46

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