6R机械手在CMP设备中的运动空间分析

摘要

The working space of the manipulator is an important dynamic index to estimate the capacity of the manipulator. Firstly, the work procedure of the manipulator is analyzed in this paper, and the working space of the manipulator is defined. Secondly, on the basis of D-H coordinate system, a mathematical model of 6R manipulator is established. Using the model and Monte-Carlo method, the working space of the manipulator is simulated. The simulation result shows that the manipulator＇s working space meets the CMP equipment＇s requirements.%工作空间是一个衡量机械手工作能力的重要运动学指标。通过分析抛光机中机械手的工作流程，确定了机械手工作空间；并利用D-H坐标法，建立6R机械手的数学模型，得到机械手来端坐标系相对于基坐标系的传递矩阵。最后，采用蒙特卡洛数值分析法，仿真了机械手的运动空间，结果显示，该机械手的运动空间大于设备要求的工作空间。满足CMP设备的使用需求。