MEMS惯性技术的发展及应用

摘要

Micro Electro Mechanical Systems (MEMS) has become a research hotspot of the tactical inertial navigation, and one of the main research directions for future inertial navigation technology. This survey is conducted for the development and application of MEMS inertial navigation. A brief introduction of MEMS inertial sensors is first given, also the development of MEMS inertial system is introduced by the research program of Draper laboratory, then the latest developments of MEMS inertial measurement unit (IMU) and MEMS integrated navigation system has been surveyed, at last the development trend of MEMS inertial system has been summarized. High-performance MEMS gyros, chip scale MEMS-IMU and MEMS integrated system is the development trend of the MEMS inertial technology.%MEMS惯性技术是近年来战术级惯性导航的研究热点，也是惯性导航技术未来的主要发展方向之一。本文介绍了MEMS惯性传感器的发展概况，结合Draper实验室的MEMS惯性系统项目计划介绍了MEMS惯性系统的发展，分别介绍了MEMS惯性测量单元和MEMS组合导航技术的最新进展，并展望了MEMS惯性系统的发展趋势。高性能MEMS陀螺、芯片级MEMS-IMU和MEMS组合导航系统是MEMS惯性技术未来的发展趋势。