一种差动电容式加速度传感器设计的理论研究

摘要

设计了一种差动式测振传感器,建立了差动电容式加速度传感器的数学模型,并通过电容的推导计算对其进行了特性分析.对检测电路的结构进行了分析,给出了典型电路结构,推到了电路参数及性能;本设计具有电路结构简单,频率范围宽约0～500Hz,线性度小于1%,灵敏度高,输出稳定,测量误差小等优点;通过实验,各项性能指标满足设计要求.%Designed a inertial vibration sensors. The mathematic model of a differential capacitive acceleration sensor was built up and its characteristic analysis was discussed. The composition of the examinant electric circuit was analyzed. The design has many excellences, such as simple circuit constitution, 0～500Hz frequency range, less than l percent linearity, high sensitive ability, stability output, little measuring error. Every capability index was examined by experiments and all satisfy the design requirements.