Bulk-Micromachined Capacitive Servo-Accelerometer

摘要

The evolution in integrated-curcuit technology has led to numerous applicationsusing electronic circuits. In order for the application to serve a real-world purpose, various non-electrical parameters have to be measured, which requires sensors to convert physical information into electrical information for signal processing. As a result of this need, a silicon sensor technology has emerged from the microtechnology, which has led to the realization of a large variety of sensors. By using the same silicon technology, the sensor and integrated circuit can be fabricated on the same chip, which can result in very small, reliable smart sensor systems. However, in order to be able to use these silicon sensors, the silicon material must be sensitive to the effect to be measured. As the silicon material has excellent mechanical qualities and can relatively easy be machined, amongst the first sensors profiting from this technology were mechanical sensors, such as pressure sensors and accelerometers.