掺杂CNT的Fe2O3气体传感器对乙醇气敏特性的研究

摘要

Doping the acidified carbon nanotubes(CNT)in Fe2O3 by using the different proportions,the morphology of sensitive material were characterized by scanning electron microscopy(SEM),and fabricated heater-type gas sen⁃sor compared with Fe2O3 gas sensor under the atmosphere of ethanol. Analyze the impact of doping,the working tem⁃perature and gas concentration to the sensitivity and response recovery time of the gas sensor. Meanwhile do re⁃search on sensing mechanism. Results show that the right amount of carbon nanotubes doped effectively not only im⁃proves the sensitivity but also shortens the response recovery time. The sensitivity of the sensor is 3.4 when the con⁃centration of ethanol is 50×10-6 at 216℃.%采用酸化后的碳纳米管（CNT）对Fe2O3进行不同比例的掺杂，利用扫描电镜（SEM）对气敏材料进行表征，制作成旁热式气体传感器后在乙醇气氛中与Fe2O3气体传感器进行对比。重点分析了掺杂量，工作温度及气体浓度对传感器灵敏度及响应恢复时间的影响，并对气敏机理进行了详细研究。结果表明碳纳米管的适量掺杂有效的提高了传感器的灵敏度并缩短了响应恢复时间，其中在216℃时对50×10-6的乙醇气体灵敏度达3.4。