Growth of GaN/AlxGa1-xN (x=0.65) Superlattices on Si(111) Substrates Using RF-MBE

摘要

Superlattices with varying GaN well widths (2, 3, 6, 9 nm) and fixed AlGaN barrier (8 nm) with high Al-content (x=0.65) were grown. Streaky RHEED patterns indicated 2D growth mode for the superlattices. XRD measurements showed multiple satellite peaks corresponding to uniform periodicity of the GaN/AlGaN pairs. The AlGaN barrier XRD peak also shifted with increasing well widths, while the GaN XRD peak was nominally unchanged. Room temperature photoluminescence experiments revealed peak emissions at energies lower than the bulk GaN energy gap. The large red shift with respect to the bulk gap is attributed to significant Stark effect for wide multiple quantum wells.