氧化锌薄膜生长与ZnO基薄膜晶体管制备

摘要

The ZnO films were deposited on the substrate of glass by MOCVD. The X-ray diffraction pat- terns of samples show sharp diffraction peaks ZnO(0 0 2),indicating that the films were highly c-axis ori-ented. Based on the ZnO film,we fabricated ZnO thin film transistor(ZnO-TFT).%通过金属有机化学气相沉积(MOCVD)方法生长ZnO薄膜.XRD测试显示出(002)晶面的强衍射峰,表明生长的ZnO 薄膜是主度的c轴取向.基于 ZnO 薄膜基础,我们制备了 ZnO 基薄膜晶体管.