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High Performance and Highly Reliable ZnO Thin Film Transistor Fabricated by Atomic Layer Deposition for Next Generation Displays.

机译：用于下一代显示器的原子层沉积制备的高性能和高可靠性ZnO薄膜晶体管。

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摘要

In this study, ZnO thin-film transistors (TFTs) were fabricated using channel layers deposited by plasma assisted ALD (PA-ALD) at low temperature. During the research high-performance ZnO TFTs were obtained by reducing residual carrier concentrations.

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作者
Uraoka, Y.;
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年度 2011
页码 1-10
总页数 10
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Transistors; Electrical properties; Fabrication; Growth(General); Oxidizers; Performance(Engineering); Physical properties; Refractive index; Reliability; Thin films; Zinc oxides; Thin film transistors; Atomic layer deposition; Foreign reports;

机译：晶体管;电气特性;加工;生长（一般）;氧化剂;性能（工程）;物理性质;折射率;可靠性;薄膜;氧化锌;薄膜晶体管;原子层沉积;国外报告;

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专利

1. Enhanced Performance in Al-Doped ZnO Based Transparent Flexible Transparent Thin-Film Transistors Due to Oxygen Vacancy in ZnO Film with Zn-Al-O Interfaces Fabricated by Atomic Layer Deposition [J] . Li Yang, Yao Rui, Wang Huanhuan, ACS applied materials & interfaces . 2017,第13期

机译：通过由原子层沉积制造的Zn-Al-O界面在ZnO膜中的氧空位，增强了基于ZnO的透明柔性透明薄膜晶体管的性能。用原子层沉积制造的Zn-Al-O界面
2. High-performance ZnO thin-film transistor fabricated by atomic layer deposition [J] . Byeong-Yun Oh, Young-Hwan Kim, Hee-Jun Lee, Semiconductor science and technology . 2011,第8期

机译：通过原子层沉积制造的高性能ZnO薄膜晶体管
3. Effects of channel structure consisting of ZnO/Al2O3 multilayers on thin-film transistors fabricated by atomic layer deposition [J] . Cui Guodong, Han Dedong, Dong Junchen, Japanese journal of applied physics . 2017,第4S期

机译：ZnO / Al2O3多层沟道结构对原子层沉积制备薄膜晶体管的影响
4. Low temperature processed ZnO thin film transistors fabricated by plasma assisted atomic layer deposition [C] . Kawamura Yumi, Tani Mai, Horita Masahiro, 2011 International Meeting for Future of Electron Devices, Kansai . 2011

机译：通过等离子体辅助原子层沉积制备的低温处理的ZnO薄膜晶体管
5. Plasma enhanced atomic layer deposition ZnO thin film transistors for large area circuit applications. [D] . Li, Yuanyuan. 2013

机译：用于大面积电路应用的等离子增强原子层沉积ZnO薄膜晶体管。
6. Bi-layer Channel AZO/ZnO Thin Film Transistors Fabricated by Atomic Layer Deposition Technique [O] . Huijin Li, Dedong Han, Liqiao Liu, 2017

机译：原子层沉积技术制备的双层沟道AZO / ZnO薄膜晶体管
7. Bi-layer Channel AZO/ZnO Thin Film Transistors Fabricated by Atomic Layer Deposition Technique [O] . 2017

机译：原子层沉积技术制备的双层沟道AZO / ZnO薄膜晶体管

High Performance and Highly Reliable ZnO Thin Film Transistor Fabricated by Atomic Layer Deposition for Next Generation Displays.

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