MEMS micro-energy indicates the micro-fabrication technology that can be used to attain the microdevices and systems of energy acquisition and conversion, storage and release, while the micro-supercapacitor is a micro-energy storage device based on electrochemical energy storage mechanism. A micro-supercapacitor was designed and fabricated with a side-by-side electrode configuration structure. It was constructed by micro-structure,feature film and acid electrolyte, in which the micro-structure was made by the microfabrication technology including ICP etching,while the PPY(Polypyrrole) feature film of the micro electrode was electrodeposited on the surface of the current collector. The electrochemical test results show that the micro-supercapacitors has a specific capacity of 6.6 mF/cm2 and an energy density of 3 mJ/cm2. The results also indicate that comparing to the PPY, the PPYnanotubes composite can greatly decrease the internal resistance, improve the energy-storage density of the micro-supercapacitor. Anyway, the charge and discharge performance of the micro-supercapacitor can be greatly improved when using the PPY-nanotubes composite.%MEMS 微能源是指采用微加工技术制作实现能量的获取与转换、存储与释放的微纳器件与系统,而微型超级电容器则是一种基于电化学电容实现储能的微型能量存储器件,可作为能量存储单元在MEMS微电源系统中获得应用.设计制作了一种具有两腔并排式结构的微型聚吡咯超级电容器.该微型超级电容器南微结构,微电极功能薄膜以及酸性电解液构成,其微结构是基于ICP刻蚀等微加工工艺加工实现的,而微电极功能薄膜是通过电化学沉积工艺在集流体表面沉积聚吡咯功能薄膜制备而成的.测试结果表明上述微犁超级电容具有6.6mF/cm2的比容量,其能量密度能达到3mJ/cm2.电化学测试结果表明,与纯聚吡咯膜相比,聚吡咯/碳纳米管复合功能薄膜阻抗显著降低,容量明显提高,基于上述复合功能薄膜的微型超级电容器其充放电性能可得到显著改善.
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